13 January 1992 Final surface error correction of an off-axis aspheric petal by ion figuring
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Abstract
The final surface figure error correction of a 1.3 m ULETM frit-bonded, ultra- lightweight, off-axis primary mirror petal was successfully completed using the ion figuring process. The petal was a concave aspheric optical element. Ion figuring is an optical fabrication method that provides highly controlled error correction of previously polished surfaces using a directed, inert and neutralized ion beam to physically sputter material from the optic surface. The surface figure error of the petal following conventional polishing was 5.02 (lambda) p-v, 0.62 (lambda) rms, and was improved to 0.17 (lambda) p-v, 0.015 (lambda) rms in four process (test-ion figure) iterations ((lambda) equals 632.8 nm). A multi-iteration process sequence was selected to address the various surface figure error volume and spatial frequency components and involved applying three different beam removal functions. The benefits of ion figuring a complex shaped optic using multiple figuring-testing iterations were clearly demonstrated.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lynn N. Allen, John J. Hannon, Richard W. Wambach, "Final surface error correction of an off-axis aspheric petal by ion figuring", Proc. SPIE 1543, Active and Adaptive Optical Components, (13 January 1992); doi: 10.1117/12.51181; https://doi.org/10.1117/12.51181
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