1 November 1991 Hartmann-Shack wavefront sensor using a binary optic lenslet array
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We have used the advantages of the photolithographic process to build a Hartmann-Shack type wavefront sensor using a 65 X 50 element binary optic lens array as the wavefront sampling element. The inherent accuracy and versatility of the lithographic process has reduced sampling and calibration errors associated with classic Hartmann sensing by allowing the lens array geometry to be tailored to CCD detector geometry with extreme precision. Combined with a quad-cell centroiding algorithm and wavefront reconstruction routines based on the successive over relaxation (SOR) algorithm, we present a wavefront sensor with submicron spot position accuracy, uniform response curves for all spots in the array, high dynamic range, and relative insensitivity to laboratory environmental vibrations. Experimental results obtained during a comparison of its performance to established wavefront methods are presented.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Deborah P. Kwo, Deborah P. Kwo, George Damas, George Damas, William P. Zmek, William P. Zmek, Mitch Haller, Mitch Haller, } "Hartmann-Shack wavefront sensor using a binary optic lenslet array", Proc. SPIE 1544, Miniature and Micro-Optics: Fabrication and System Applications, (1 November 1991); doi: 10.1117/12.49374; https://doi.org/10.1117/12.49374


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