1 November 1991 Laser ablation of refractive micro-optic lenslet arrays
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Abstract
A CO2 laser is used to ablate concave lenslets in fused silica; these lenslets are then used to replicate or mold convex lenslets in plastic. The lenses range in size from 100 micrometers to 500 micrometers in diameter with speeds from f/1 to greater than f/10. The size and speed of the lenses can be controlled by changing the power, size, and exposure time of a focused CO2 laser beam. The ablation process is repeatable and lends itself easily to making large arrays of lenslets, limited in size only by the travel constraints of the mechanical stages that move the fused silica work piece. The entire process has been computerized so that an array of micro- optic lenses can be made accurately to any specification. Lenslets have been made in arrays of 1 X 10 to 60 X 60 with spacings of 300 micrometers to 2 mm between the centers of the lenslets.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
James A. Bartley, William C. Goltsos, "Laser ablation of refractive micro-optic lenslet arrays", Proc. SPIE 1544, Miniature and Micro-Optics: Fabrication and System Applications, (1 November 1991); doi: 10.1117/12.49381; https://doi.org/10.1117/12.49381
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