Paper
1 November 1991 Overview of micro-optics: past, present, and future
Wilfrid B. Veldkamp
Author Affiliations +
Abstract
Through advances in semiconductor miniaturization technology microrelief patterns with characteristic dimensions as small as the wavelength of light can now be mass reproduced to form high-quality and low-cost optical components. In a unique example of technology transfer from electronics to optics this capability is allowing optics designers to create innovative optical components that promise to solve key problems in optical sensors optical communication channels and optical processors.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wilfrid B. Veldkamp "Overview of micro-optics: past, present, and future", Proc. SPIE 1544, Miniature and Micro-Optics: Fabrication and System Applications, (1 November 1991); https://doi.org/10.1117/12.49395
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CITATIONS
Cited by 26 scholarly publications.
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KEYWORDS
Micro optics

Diffraction

Sensors

Electronics

Optical components

Image processing

Lithography

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