Grating efficiency theory versus experimental data in extreme situations

Michel Neviere; Antonius J. F. den Boggende; Howard A. Padmore; K. Hollis

doi:10.1117/12.49403

1 October 1991 Grating efficiency theory versus experimental data in extreme situations

Michel Neviere, Antonius J. F. den Boggende, Howard A. Padmore, K. Hollis

Author Affiliations +

Proceedings Volume 1545, International Conference on the Application and Theory of Periodic Structures; (1991) https://doi.org/10.1117/12.49403
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

Comparisons between Electromagnetic Theory predictions and measurements are presented for four types of gratings supporting a very high number of diffracted orders. The first type consists of gold coated gratings used in soft X-ray region. The second one is a multilayer grating designed to have a broad reflection band around 0.6 nm wavelength. The third type is a transmission echelle used in the visible and the fourth, an echelette grating for use in the X-ray region. Good agreement between theory and experiment was found in all cases. In the latter case, the groove shape was far from ideal but using the real measured profile in the efficiency calculation good agreement was found even in this extreme situation.

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Michel Neviere, Antonius J. F. den Boggende, Howard A. Padmore, and K. Hollis "Grating efficiency theory versus experimental data in extreme situations", Proc. SPIE 1545, International Conference on the Application and Theory of Periodic Structures, (1 October 1991); doi: 10.1117/12.49403; https://doi.org/10.1117/12.49403

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