1 October 1991 Grating line shape characterization using scatterometry
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Abstract
Identification of dimensional parameters of an arbitrarily shaped grating using scatter characteristics is presented. A rigorous diffraction model is used to predict the scatter from a known grating structure, and utilizing this information we perform the inverse problem of predicting line shape from a measurement of the scatter.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kenneth P. Bishop, Susan M. Gaspar, Lisa-Michelle Milner, S. Sohail H. Naqvi, and John Robert McNeil "Grating line shape characterization using scatterometry", Proc. SPIE 1545, International Conference on the Application and Theory of Periodic Structures, (1 October 1991); doi: 10.1117/12.49402; https://doi.org/10.1117/12.49402
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