1 October 1991 Integral equation method for biperiodic diffraction structures
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Abstract
We describe an integral approach to the rigorous solution of Maxwell's equations for diffraction from a biperiodic grating having arbitrary profile and periodicity. Emphasis is placed on the implementation of solutions and is addressed to the engineering community. The method described is amenable to mathematical convergence analysis. A numerical example is given which indicates convergence of solutions.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David C. Dobson, David C. Dobson, J. Allen Cox, J. Allen Cox, } "Integral equation method for biperiodic diffraction structures", Proc. SPIE 1545, International Conference on the Application and Theory of Periodic Structures, (1 October 1991); doi: 10.1117/12.49406; https://doi.org/10.1117/12.49406
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