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1 October 1991 Multiple-beam accessor using microzone plate elements for optoelectronic integrated circuits
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Abstract
A trial design and fabrication of a multiple beam accessor using micro-Fresnel zone plate elements are reported. An element is composed of two orthogonal linear zone plate arrays with line width changing from 1.0 micrometers to 1.6 micrometers . The focusing characteristics are examined at 0.83 micrometers in wavelength using a laser diode. The feasibility of applying it to a high speed optoelectronic integrated circuit and a parallel optoelectronic computing scheme is discussed.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kashiko Kodate and Takeshi Kamiya "Multiple-beam accessor using microzone plate elements for optoelectronic integrated circuits", Proc. SPIE 1545, International Conference on the Application and Theory of Periodic Structures, (1 October 1991); https://doi.org/10.1117/12.49423
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