1 January 1992 Diffraction of multilayer-coated plane gratings in terms of the reciprocal space
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Proceedings Volume 1546, Multilayer and Grazing Incidence X-Ray/EUV Optics; (1992); doi: 10.1117/12.51256
Event: San Diego, '91, 1991, San Diego, CA, United States
Abstract
We present a model for multilayer coated plane gratings that uses a reciprocal space description similar to the standard treatment of crystal diffraction. This model enables us to separate the contributions from the multilayer coating and the underlying substrate. We demonstrate its use on laminar and blazed gratings, and show that it can be easily applied to more complicated grating substrates as well. Because the separation between the two terms is complete, we suggest replacing the multilayer term with a dynamic diffraction calculation when additional model accuracy is required.
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Yan Wu, William K. Warburton, "Diffraction of multilayer-coated plane gratings in terms of the reciprocal space", Proc. SPIE 1546, Multilayer and Grazing Incidence X-Ray/EUV Optics, (1 January 1992); doi: 10.1117/12.51256; https://doi.org/10.1117/12.51256
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KEYWORDS
Diffraction gratings

Multilayers

Diffraction

Scattering

Reflection

Coating

Fourier transforms

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