1 January 1992 Evaluation of reflectors for soft x-ray optics
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It is necessary to characterize surface roughness in order to clarify the relation between reflectivity and roughness. A comparison between characterized roughness of direct measurement of surface and calculated roughness from measured reflectivity is made. Surface roughness was improved using the dual ion beam sputtering method as a parameter of assisting ion energy. As a result, those two roughnesses showed good agreement and the surface roughness becomes minimum at assisting ion energy of 50 eV.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kazuyuki Etoh, Kazuyuki Etoh, Noriyoshi Hoshi, Noriyoshi Hoshi, Toshihiro Yonemitu, Toshihiro Yonemitu, Herve-Andre Durand, Herve-Andre Durand, Jean-Jacques Delaunay, Jean-Jacques Delaunay, Kazuhiko Ito, Kazuhiko Ito, Ichiro Yamada, Ichiro Yamada, Izumi Kataoka, Izumi Kataoka, } "Evaluation of reflectors for soft x-ray optics", Proc. SPIE 1546, Multilayer and Grazing Incidence X-Ray/EUV Optics, (1 January 1992); doi: 10.1117/12.51215; https://doi.org/10.1117/12.51215

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