1 January 1992 Fabrication and analysis of Mo-Si multilayers
Author Affiliations +
Abstract
Molybdenum-Silicon (Mo-Si) multilayers have been fabricated in our laboratory for reflecting various soft x-ray wavelengths. Several normal incidence mirrors have been produced for a solar sounding rocket flight. Using properly shaped masks on 3 in. diameter dc magnetrons, we can produce multilayers of a similar size having a uniformity of better than +/- 3 over their entire surface area. Peak reflectance of the multilayers are as high as 42 at 171 angstroms. Efforts are underway to deposit several layers of different period on top of the multilayers in order to attenuate the reflection of 304 angstroms, a very bright line of He II in the solar spectrum. In the interim, we have made a Mo-Si mirror that reflects at 304 angstroms. In addition to obtaining information on the solar corona at this wavelength, this will greatly reduce the effects of the He II line when its image is appropriately subtracted from others. These results and a discussion of the current status of our multilayer research is presented.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lawrence Shing, Richard C. Catura, "Fabrication and analysis of Mo-Si multilayers", Proc. SPIE 1546, Multilayer and Grazing Incidence X-Ray/EUV Optics, (1 January 1992); doi: 10.1117/12.51220; https://doi.org/10.1117/12.51220
PROCEEDINGS
7 PAGES


SHARE
RELATED CONTENT

Vote taking for EUV lithography a radical approach to...
Proceedings of SPIE (March 24 2017)
W/C multilayers deposited on plastic films
Proceedings of SPIE (January 21 1993)
Time stability of multilayer reflectivity
Proceedings of SPIE (November 11 1994)
Production of silicon mirror plates
Proceedings of SPIE (August 31 2009)
Recent Results In Multilayer Research
Proceedings of SPIE (December 16 1988)

Back to Top