1 January 1992 Method for characterizing multilayer coatings on curved substrates
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Abstract
The x-ray characterization of multilayer coatings at very low angles on curved substrates is limited by the radius of curvature and surface dimensions. Plane and cylindrical multilayers were manufactured in the same process and characterized as deposited. After flattening the cylindrical surface and curving the plane surface, the same were recharacterized. These measurements and the techniques used to characterize cylindrical surfaces are discussed with the goal of developing techniques for future application to the characterization of spherical, elliptical, or paraboloidal surfaces.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
George Gutman, Kevin Parker, James Scholhamer, James L. Wood, "Method for characterizing multilayer coatings on curved substrates", Proc. SPIE 1546, Multilayer and Grazing Incidence X-Ray/EUV Optics, (1 January 1992); doi: 10.1117/12.51216; https://doi.org/10.1117/12.51216
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