1 January 1992 Metrology of x-ray optics utilizing shearing interferometric techniques
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This paper will discuss the optical testing of extreme grazing incidence mirror systems and normal incidence high-precision mirror systems during fabrication processing of the optical substrates. The optical metrology is closely coupled with an advanced material removal process which will be discussed in terms of the optical metrology. Interferometric data will be presented of the optical surfaces. Surface roughness data will be shown and discussed.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Phillip C. Baker, Phillip C. Baker, Richard B. Hoover, Richard B. Hoover, } "Metrology of x-ray optics utilizing shearing interferometric techniques", Proc. SPIE 1546, Multilayer and Grazing Incidence X-Ray/EUV Optics, (1 January 1992); doi: 10.1117/12.51255; https://doi.org/10.1117/12.51255


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