PROCEEDINGS VOLUME 1547
SAN DIEGO, '91 | 21-21 JULY 1991
Multilayer Optics for Advanced X-Ray Applications
Editor(s): Natale M. Ceglio
SAN DIEGO, '91
21-21 July 1991
San Diego, CA, United States
Multilayer Fabrication and Characterization I
Proc. SPIE 1547, High-performance multilayer mirrors for soft x-ray projection lithography, 0000 (1 January 1992); https://doi.org/10.1117/12.51265
Proc. SPIE 1547, Fabrication of advanced x-ray optics with magnetron minisource arrays, 0000 (1 January 1992); https://doi.org/10.1117/12.51266
Proc. SPIE 1547, Structural characteristics and performances of rf-sputtered Mo/Si and Co/Si multilayers for soft x-ray optics, 0000 (1 January 1992); https://doi.org/10.1117/12.51267
Proc. SPIE 1547, Low-Z1/low-Z2 multilayer x-ray optical thin films, 0000 (1 January 1992); https://doi.org/10.1117/12.51269
Proc. SPIE 1547, Boron-based multilayers for soft x-ray optics, 0000 (1 January 1992); https://doi.org/10.1117/12.51270
Proc. SPIE 1547, Characterization of Pd-B, Ag-B, and Si-B interfaces, 0000 (1 January 1992); https://doi.org/10.1117/12.51271
Applications of Multilayer Technology
Proc. SPIE 1547, Soft x-ray projection lithography system design and cost analysis, 0000 (1 January 1992); https://doi.org/10.1117/12.51272
Proc. SPIE 1547, Reflection masks for soft x-ray projection lithography, 0000 (1 January 1992); https://doi.org/10.1117/12.51273
Proc. SPIE 1547, Differential equation method for design of multimirror x-ray projection lithography systems, 0000 (1 January 1992); https://doi.org/10.1117/12.51274
Proc. SPIE 1547, Multilayer mirrors for XUV Ge laser wavelengths, 0000 (1 January 1992); https://doi.org/10.1117/12.51275
Multilayer Fabrication and Characterization II
Proc. SPIE 1547, Precision soft x-ray reflectometry of curved multilayer optics, 0000 (1 January 1992); https://doi.org/10.1117/12.51276
Proc. SPIE 1547, Soft x-ray reflectometry of multilayer coatings using a laser-plasma source, 0000 (1 January 1992); https://doi.org/10.1117/12.51277
Proc. SPIE 1547, Annealing studies of Ru/Si multilayer by high-angle annular dark-field microscopy and HREM, 0000 (1 January 1992); https://doi.org/10.1117/12.51278
Proc. SPIE 1547, Fabrication and characterization of beryllium-based multilayer mirrors for soft x-rays, 0000 (1 January 1992); https://doi.org/10.1117/12.51279
Damage and Survivability of Multilayer Mirrors
Proc. SPIE 1547, Structural changes induced by thermal annealing in W/C multilayers, 0000 (1 January 1992); https://doi.org/10.1117/12.51280
Proc. SPIE 1547, Thermal stability of Mo/Si multilayers, 0000 (1 January 1992); https://doi.org/10.1117/12.51281
Proc. SPIE 1547, Two methods to improve the optical quality of Ni-C multilayer coatings: ion bombardment and optimization of the substrate temperature, 0000 (1 January 1992); https://doi.org/10.1117/12.51282
Proc. SPIE 1547, Repair of high-performance multilayer coatings, 0000 (1 January 1992); https://doi.org/10.1117/12.51283
Multilayer Fabrication and Characterization II
Proc. SPIE 1547, Upgraded facility for multilayer mirror characterization at NIST, 0000 (1 January 1992); https://doi.org/10.1117/12.51284
Multilayer Fabrication and Characterization I
Proc. SPIE 1547, Simulation of the growth of Mo/Si multilayers, 0000 (1 January 1992); https://doi.org/10.1117/12.51285
Multilayer Fabrication and Characterization II
Proc. SPIE 1547, Experimental study of Fe/C multilayer performance: effects of substrate quality and of x-ray irradiation, 0000 (1 January 1992); https://doi.org/10.1117/12.51286
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