1 January 1992 Multilayer coatings on figured optics
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Abstract
Soft x-ray projection lithography (SXPL) requires uniform, high reflectivity multilayer (ML) coatings on figured optical surfaces with lens speeds (f) between 3 and 6 and diameters of 10 to 15 cm. High reflectivity Mo-Si ML coatings for operation near 13 nm were deposited on f 3.4 and f 6 optics 5 and 7.5 cm in diameter using planar dc magnetron sputtering. Measurements of the normal incidence reflectivity (NIR) of 63% at 13 nm uniform over the central 5 cm of the figured surface were obtained. Comparison of the measured values to model calculations of the wavelength dependent reflectivity indicate that the ML period is uniform to better than 0.04 nm over this region.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Stephen P. Vernon, Daniel Gorman Stearns, Robert S. Rosen, Natale M. Ceglio, David P. Gaines, Michael K. Krumrey, Peter Mueller, "Multilayer coatings on figured optics", Proc. SPIE 1547, Multilayer Optics for Advanced X-Ray Applications, (1 January 1992); doi: 10.1117/12.51268; https://doi.org/10.1117/12.51268
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