1 January 1992 Multilayer coatings on figured optics
Author Affiliations +
Soft x-ray projection lithography (SXPL) requires uniform, high reflectivity multilayer (ML) coatings on figured optical surfaces with lens speeds (f) between 3 and 6 and diameters of 10 to 15 cm. High reflectivity Mo-Si ML coatings for operation near 13 nm were deposited on f 3.4 and f 6 optics 5 and 7.5 cm in diameter using planar dc magnetron sputtering. Measurements of the normal incidence reflectivity (NIR) of 63% at 13 nm uniform over the central 5 cm of the figured surface were obtained. Comparison of the measured values to model calculations of the wavelength dependent reflectivity indicate that the ML period is uniform to better than 0.04 nm over this region.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Stephen P. Vernon, Stephen P. Vernon, Daniel Gorman Stearns, Daniel Gorman Stearns, Robert S. Rosen, Robert S. Rosen, Natale M. Ceglio, Natale M. Ceglio, David P. Gaines, David P. Gaines, Michael K. Krumrey, Michael K. Krumrey, Peter Mueller, Peter Mueller, } "Multilayer coatings on figured optics", Proc. SPIE 1547, Multilayer Optics for Advanced X-Ray Applications, (1 January 1992); doi: 10.1117/12.51268; https://doi.org/10.1117/12.51268


Laterally graded multilayer optics for x-ray analysis
Proceedings of SPIE (November 22 1999)
Graded period multilayer structures for x-ray optics
Proceedings of SPIE (January 20 1993)
Multilayer Structures For X-Ray Laser Cavities
Proceedings of SPIE (May 05 1985)
Multilayer growth in the APS rotary deposition system
Proceedings of SPIE (September 19 2007)
Si-based multilayers with high thermal stability
Proceedings of SPIE (November 07 2000)
Repair of high-performance multilayer coatings
Proceedings of SPIE (December 31 1991)

Back to Top