Precision soft x-ray reflectometry of curved multilayer optics

Michael K. Krumrey; Mikhael Kuehne; Peter Mueller; Frank Scholze

doi:10.1117/12.51276

1 January 1992 Precision soft x-ray reflectometry of curved multilayer optics

Michael K. Krumrey, Mikhael Kuehne, Peter Mueller, Frank Scholze

Proceedings Volume 1547, Multilayer Optics for Advanced X-Ray Applications; (1992) https://doi.org/10.1117/12.51276
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

In the PTB laboratory at the electron storage ring BESSY flat multilayer mirrors as well as curved multilayer optics are characterized in the soft x-ray region using synchrotron radiation. Precision reflectometry is performed in the spectral range between 5 and 30 nm where the content of higher orders in the monochromatized radiation is below 2%. The existing facilities and current improvements of the instrumentation are described. Examples for spatially resolved measurements of the reflectance of curved multilayer optics are presented.

Citation Download Citation

Michael K. Krumrey, Mikhael Kuehne, Peter Mueller, and Frank Scholze "Precision soft x-ray reflectometry of curved multilayer optics", Proc. SPIE 1547, Multilayer Optics for Advanced X-Ray Applications, (1 January 1992); https://doi.org/10.1117/12.51276

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