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1 January 1992 Precision soft x-ray reflectometry of curved multilayer optics
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Abstract
In the PTB laboratory at the electron storage ring BESSY flat multilayer mirrors as well as curved multilayer optics are characterized in the soft x-ray region using synchrotron radiation. Precision reflectometry is performed in the spectral range between 5 and 30 nm where the content of higher orders in the monochromatized radiation is below 2%. The existing facilities and current improvements of the instrumentation are described. Examples for spatially resolved measurements of the reflectance of curved multilayer optics are presented.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael K. Krumrey, Mikhael Kuehne, Peter Mueller, and Frank Scholze "Precision soft x-ray reflectometry of curved multilayer optics", Proc. SPIE 1547, Multilayer Optics for Advanced X-Ray Applications, (1 January 1992); https://doi.org/10.1117/12.51276
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