Translator Disclaimer
1 January 1992 Soft x-ray reflectometry of multilayer coatings using a laser-plasma source
Author Affiliations +
Abstract
A new high-resolution soft x-ray reflectometer system utilizing a laser-plasma light source is described. This reflectometer is used to measure the reflectance of multilayer-coated optics for projection lithography. A detailed description of the instrument is presented, along with recent results obtained for a variety of soft x-ray multilayer coatings, multilayer-coated figured optics, and patterned x-ray reflection masks
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David L. Windt and Warren K. Waskiewicz "Soft x-ray reflectometry of multilayer coatings using a laser-plasma source", Proc. SPIE 1547, Multilayer Optics for Advanced X-Ray Applications, (1 January 1992); https://doi.org/10.1117/12.51277
PROCEEDINGS
15 PAGES


SHARE
Advertisement
Advertisement
Back to Top