Upgraded facility for multilayer mirror characterization at NIST

Richard N. Watts; David L. Ederer; Richard D. Deslattes Jr.; Thomas B. Lucatorto; William Tyler Estler; Christopher J. Evans; Theodore V. Vorburger

doi:10.1117/12.51284

1 January 1992 Upgraded facility for multilayer mirror characterization at NIST

Richard N. Watts, David L. Ederer, Richard D. Deslattes Jr., Thomas B. Lucatorto, William Tyler Estler, Christopher J. Evans, Theodore V. Vorburger

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Proceedings Volume 1547, Multilayer Optics for Advanced X-Ray Applications; (1992) https://doi.org/10.1117/12.51284
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

In response to the needs of the emerging field of normal incidence soft x-ray optics, a field with applications ranging from extreme ultraviolet (XUV) solar imaging to x-ray lithography, the National Institute of Standards and Technology (NIST) has initiated an XUV multilayer and optical substrate characterization program. In this paper, we give an overview of the present capabilities of the NIST facility and discuss some of the proposed improvements, concentrating on the new soft x-ray reflectometry facility being built at SURF.

Citation Download Citation

Richard N. Watts, David L. Ederer, Richard D. Deslattes Jr., Thomas B. Lucatorto, William Tyler Estler, Christopher J. Evans, and Theodore V. Vorburger "Upgraded facility for multilayer mirror characterization at NIST", Proc. SPIE 1547, Multilayer Optics for Advanced X-Ray Applications, (1 January 1992); https://doi.org/10.1117/12.51284

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