1 January 1992 Calibration of profilometer transmission characteristics with heterodyne interferometry (Proceedings Only)
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Abstract
A method of calibrating profilometer transmission characteristics with a heterodyne interferometer is described. This method has the advantages of high precision, setting no strict demands on the environment and being efficient. The work range of the calibrating system is from 0.15 micrometers to 40 micrometers for Ra. The uncertainty of the calibrating is +/- 1%, and the frequency is between 1 Hz and 180 Hz.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Pengsheng Li, Pengsheng Li, Hua Li, Hua Li, Zuo Zhang, Zuo Zhang, "Calibration of profilometer transmission characteristics with heterodyne interferometry (Proceedings Only)", Proc. SPIE 1553, Laser Interferometry IV: Computer-Aided Interferometry, (1 January 1992); doi: 10.1117/12.135347; https://doi.org/10.1117/12.135347
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