Measurement of displacement using interference fringes localized at infinity

Tomoaki Eiju; Kiyofumi Matsuda; Thomas H. Barnes; M. Yusrandihardja; Diaz Santika; Makoto Yamauchi

doi:10.1117/12.135338

1 January 1992 Measurement of displacement using interference fringes localized at infinity

Tomoaki Eiju, Kiyofumi Matsuda, Thomas H. Barnes, M. Yusrandihardja, Diaz Santika, Makoto Yamauchi

Proceedings Volume 1553, Laser Interferometry IV: Computer-Aided Interferometry; (1992) https://doi.org/10.1117/12.135338
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

Fringe counting techniques are often used in modern laser interferometers for measuring displacement. These interferometers are essentially integrating devices, where the displacement is derived from an accumulated fringe count; that is, they measure travel rather than static displacement. If the interferometer optical paths are interrupted during a measurement cycle, the reference for the instrument is lost and accuracy suffers. In this paper, we describe a holographic technique whereby displacement is measured by analyzing a fringe pattern localized at infinity which is equivalent to Haidinger or Brewster fringes in conventional interferometry. The phase distribution of the fringe pattern is measured to high accuracy using phase-stepping interferometry, and then analyzed by computer. Using this technique, we were able to measure in plane displacements with an accuracy of about 0.2 micrometers , while the accuracy for out of plane displacements was about 2 micrometers .

Citation Download Citation

Tomoaki Eiju, Kiyofumi Matsuda, Thomas H. Barnes, M. Yusrandihardja, Diaz Santika, and Makoto Yamauchi "Measurement of displacement using interference fringes localized at infinity", Proc. SPIE 1553, Laser Interferometry IV: Computer-Aided Interferometry, (1 January 1992); https://doi.org/10.1117/12.135338

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