1 January 1992 Multidimensional displacement sensor using the optical feedback of laser diodes
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Abstract
A compact optical displacement sensor is reported which is based on the light undulation caused by the optical feedback on a frequency modulated laser diode. For applying this effect to the metrology, the relationship between the feedback rate and the oscillation behavior of the laser diode was investigated experimentally. As the result, it was found that the higher order of the output undulation could be suppressed by keeping the feedback rate low, and displacement measurement was performed with a resolution of 25 nm for the target distance between a few cm and 30 cm. In addition, an improved current modulation scheme for a laser diode as well as a new signal processing techniques for improving the performance is reported. As a further application, this sensor system was extended for precise measurement of two-dimensional displacement by utilizing a spherical retro-reflector.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jun-ichi Kato, Ichirou Yamaguchi, Nobuhiko Kikuchi, Shigeo Ozono, "Multidimensional displacement sensor using the optical feedback of laser diodes", Proc. SPIE 1553, Laser Interferometry IV: Computer-Aided Interferometry, (1 January 1992); doi: 10.1117/12.135288; https://doi.org/10.1117/12.135288
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