Analysis of thin-film losses from guided wave attenuations with photothermal deflection technique

Xu Liu; Jinfa Tang; Emile P. Pelletier

doi:10.1117/12.49493

1 December 1991 Analysis of thin-film losses from guided wave attenuations with photothermal deflection technique

Xu Liu, Jinfa Tang, Emile P. Pelletier

Proceedings Volume 1554, Second International Conference on Photomechanics and Speckle Metrology; (1991) https://doi.org/10.1117/12.49493
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

The loss of thin films is one of the critical parameters that limit the performances of optical thin film devices. Photothermal deflection technique has been used to measure the attenuation coefficients of the different modes in thin film guiding layers. Due to the high sensitivity of the attenuations of guided modes to the imperfaction factors of thin film, a new method is proposed to analyze the loss mechanisms of the thin film samples on separating the absorption and scattering losses. The experimental results are given, and the anealing process of thin film is also studied with this method.

Citation Download Citation

Xu Liu, Jinfa Tang, and Emile P. Pelletier "Analysis of thin-film losses from guided wave attenuations with photothermal deflection technique", Proc. SPIE 1554, Second International Conference on Photomechanics and Speckle Metrology, (1 December 1991); https://doi.org/10.1117/12.49493

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