CAD system for CGHs and laser beam lithography

Toyohiko Yatagai; Martial Henri Geiser; Ronglong Tian; Xinkang Tian; Hajime Onda

doi:10.1117/12.50616

1 December 1991 CAD system for CGHs and laser beam lithography

Toyohiko Yatagai, Martial Henri Geiser, Ronglong Tian, Xinkang Tian, Hajime Onda

Proceedings Volume 1555, Computer and Optically Generated Holographic Optics; 4th in a Series; (1991) https://doi.org/10.1117/12.50616
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

An interactive CAD system for a computer-generated hologram (CGH) is developed to produce many kinds of CGHs in the form of Postscript files, G-code files for NC machines, and HPGL files. These files can later be sent to a laser printer and also a laser beam lithography system. The laser beam lithography system developed has a writing area of 200 mmA approximately 200 mm with 0.5E m positional accuracy. By using the LBL system, some CGHs for optical interconnection and kinoforms are optimized with the simulated annealing algorithm.

Citation Download Citation

Toyohiko Yatagai, Martial Henri Geiser, Ronglong Tian, Xinkang Tian, and Hajime Onda "CAD system for CGHs and laser beam lithography", Proc. SPIE 1555, Computer and Optically Generated Holographic Optics; 4th in a Series, (1 December 1991); https://doi.org/10.1117/12.50616

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