1 December 1991 Process error limitations on binary optics performance
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Abstract
We present results characterizing the effects of processing errors on the performance of staircase kinoforms, commonly known as `binary optical devices.' Diffraction efficiency and modulation transfer function data are given for various types of processing errors present in staircase kinoforms of a f/10 Fresnel phase lens having two, four, and eight phase levels. Processing errors include etch depth, linewidth, and mask alignment. Processing errors, especially mask alignment, are shown to have the greatest impact on diffraction efficiency and very little effect on image quality.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. Allen Cox, J. Allen Cox, Bernard S. Fritz, Bernard S. Fritz, Thomas R. Werner, Thomas R. Werner, } "Process error limitations on binary optics performance", Proc. SPIE 1555, Computer and Optically Generated Holographic Optics; 4th in a Series, (1 December 1991); doi: 10.1117/12.50623; https://doi.org/10.1117/12.50623
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