1 February 1992 Near-field acoustic microscopy (Invited Paper)
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We have integrated silicon micromachining techniques with piezoelectric thin film deposition to make a near-field acoustic microscope. A piezoelectric zinc oxide (ZnO) transducer is deposited on a substrate of 7740 glass. A sharp tip is formed in a silicon wafer which is anodically bonded to the glass substrate. A sample is attached to substrate of glass with a receiving ZnO transducer. The transducer on the tip excites an ultrasonic beam which passes from the tip to the sample and is detected by the receiving transducer. A feedback signal is generated to keep the transmitted amplitude constant as a sample is raster scanned. The feedback signal is applied to a tube scanner and is also used to modulate the intensity of a display monitor. We find that the instrument has a vertical height sensitivity of about 20 angstroms, and a lateral resolution of better than 800 angstroms.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Butrus T. Khuri-Yakub, S. Akamine, B. Hadimioglu, Hidenori Yamada, and Calvin F. Quate "Near-field acoustic microscopy (Invited Paper)", Proc. SPIE 1556, Scanning Microscopy Instrumentation, (1 February 1992); doi: 10.1117/12.134885; https://doi.org/10.1117/12.134885

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