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1 February 1992 Scanning confocal microscope for precise measurement of optical fiber diameter
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Abstract
We have constructed and evaluated a scanning confocal microscope for the precise measurement of optical fiber cladding diameter. The system measures the fiber endface directly and differs from conventional microscopes in that there is no systematic error due to partial coherence. The results obtained with the scanning confocal microscope are checked by comparison with those obtained from a contact micrometer and by measuring a chrome-on- glass standard reference material provided by NIST, Gaithersburg, Maryland. Fiber diameters can be measured with a random uncertainty of 40 nm and a systematic error estimated to be 40 nm.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Steven E. Mechels and Matthew Young "Scanning confocal microscope for precise measurement of optical fiber diameter", Proc. SPIE 1556, Scanning Microscopy Instrumentation, (1 February 1992); https://doi.org/10.1117/12.134899
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