Optical waveguides in polymer materials by ion implantation

Werner F. Frank; Juergen R. Kulisch; Hilmar Franke; Dorothee M. Rueck; Stefan Brunner; Roger A. Lessard

doi:10.1117/12.50684

1 December 1991 Optical waveguides in polymer materials by ion implantation

Werner F. Frank, Juergen R. Kulisch, Hilmar Franke, Dorothee M. Rueck, Stefan Brunner, Roger A. Lessard

Proceedings Volume 1559, Photopolymer Device Physics, Chemistry, and Applications II; (1991) https://doi.org/10.1117/12.50684
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

Poly-(methyl-methacrylate) (PMMA) on different substrates was implanted by He+ ions of energies between 50 keV and 250 keV as well as 1 MeV and 2 MeV. The ion doses varied between 1012/cm2 and 1015/cm2. We have studied the increase of the refractive index in the implanted surface layer, which acts as an optical waveguide, by measuring the effective index of refraction neff for different optical modes. According to the range of ions in the polymer, surface waveguides and buried waveguides can be generated. The number of modes a waveguide is carrying depends on the ion doses. For single mode waveguides low doses must be used. Waveguides with losses below 1 dB/cm were obtained. The chemical effects caused by the implantation are measured by IR spectroscopy and residual gas analysis (RGA), physical modifications of the surface were studied by scanning electron microscopy (SEM). The refractive index profiles are discussed using simulation calculations.

Citation Download Citation

Werner F. Frank, Juergen R. Kulisch, Hilmar Franke, Dorothee M. Rueck, Stefan Brunner, and Roger A. Lessard "Optical waveguides in polymer materials by ion implantation", Proc. SPIE 1559, Photopolymer Device Physics, Chemistry, and Applications II, (1 December 1991); https://doi.org/10.1117/12.50684

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