Progress in planarized vertical-cavity surface-emitting laser devices and arrays

Robert A. Morgan; Leo M. F. Chirovsky; Marlin W. Focht; Gregory D. Guth; Moses T. Asom; Ronald E. Leibenguth; K. Cyrus Robinson; Yong-Hee Lee; Jack L. Jewell

doi:10.1117/12.50792

1 December 1991 Progress in planarized vertical-cavity surface-emitting laser devices and arrays

Robert A. Morgan, Leo M. F. Chirovsky, Marlin W. Focht, Gregory D. Guth, Moses T. Asom, Ronald E. Leibenguth, K. Cyrus Robinson, Yong-Hee Lee, Jack L. Jewell

Author Affiliations +

Proceedings Volume 1562, Devices for Optical Processing; (1991) https://doi.org/10.1117/12.50792
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

We report batch-processed, totally planar, vertical-cavity top surface emitting GaAs/AlGaAs laser devices and arrays. Different size devices are studied experimentally. We measure continuous-wave threshold currents down to 1.7 mA and output powers > 3.7 mW at room temperature. We also discuss interesting characteristics such as differential quantum efficiencies exceeding unity and multi-transverse mode behavior. An array having 64 X 1 individually-accessed elements is characterized and shown to have uniform room-temperature continuous-wave operating characteristics in threshold current approximately equals 2.1 +/- 0.1 mA, wavelength approximately equals 849.4 +/- 0.8 nm, and output power approximately equals 0.5 +/- 0.1 mW.

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Robert A. Morgan, Leo M. F. Chirovsky, Marlin W. Focht, Gregory D. Guth, Moses T. Asom, Ronald E. Leibenguth, K. Cyrus Robinson, Yong-Hee Lee, and Jack L. Jewell "Progress in planarized vertical-cavity surface-emitting laser devices and arrays", Proc. SPIE 1562, Devices for Optical Processing, (1 December 1991); https://doi.org/10.1117/12.50792

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