1 December 1991 Design, fabrication and performance of an integrated optoelectronic cellular array
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Abstract
An optoelectronic integrated circuit (OEIC) suitable for applications requiring highly parallel optical interconnections has been designed, fabricated and demonstrated. The chip integrates optical emitters, optical detectors and GaAs based electronic I.C.s on the same substrate. Its architecture consists of a two-dimensional 8x8 array of cells, with each cell containing a double heterojunction Light Emitting Diode (LED), a lateral ionimplanted photoconducting detector (PD), and a GaAs Metal-Semiconductor Field Effect Transistor (MESFET) circuit which performs amplification of the detector signal, thresholding, memory and LED drive functions. The chip consists of a total of 1300 FETs, 64 LEDs, 64 photodetectors and 500 thin-film resistors. Discrete devices fabricated with the integrated process have performance characteristics similar to those of non-integrated devices. The electrical and optical functionality of 8x8 arrays has been demonstrated. However, a feedback problem has been shown to exist between the LEDs and LED driver FETs. The source of this problem is discussed.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. Hibbs-Brenner, M. Hibbs-Brenner, } "Design, fabrication and performance of an integrated optoelectronic cellular array", Proc. SPIE 1563, Optical Enhancements to Computing Technology, (1 December 1991); doi: 10.1117/12.2321721; https://doi.org/10.1117/12.2321721
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