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1 December 1991 Epitaxial liftoff technology
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Abstract
Epitaxial liftoff permits the integration of III-V films and devices onto arbitrary material substrates. This paper will review Bellcore's work on opto-electronic integration of III-V optical transmitter and receiver devices onto LiNbO3, glass, Silicon and sapphire substrates.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
E. Yablonovitch "Epitaxial liftoff technology", Proc. SPIE 1563, Optical Enhancements to Computing Technology, (1 December 1991); https://doi.org/10.1117/12.2321749
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