1 April 1992 Advances in interferometric wavefront-measuring technology through the direct measuring interferometry method
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Abstract
With the invention of a new phase measuring technique, 'Direct Measuring Interferometry' (DMI), almost all practical difficulties of quantitative interferometry in production environment are solved to a large extent.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael F. Kuechel, Michael F. Kuechel, } "Advances in interferometric wavefront-measuring technology through the direct measuring interferometry method", Proc. SPIE 1573, Commercial Applications of Precision Manufacturing at the Sub-Micron Level, (1 April 1992); doi: 10.1117/12.57757; https://doi.org/10.1117/12.57757
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