1 April 1992 Pneumatic method for making fast, higher-resolution, noncontacting measurement of surface topography
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Abstract
Fluid Film Devices Ltd specialises mainly in the design and manufacture of self-acting or aerodynamic gas bearings. The geometric tolerances needed for these bearings can be of the order of O.lum. It was the need for rapid, noncontacting measurement of components, often made of ceramic material, that led to the re-development of the Pneumatic Probe (PP).
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ronald W. Woolley, Ronald W. Woolley, } "Pneumatic method for making fast, higher-resolution, noncontacting measurement of surface topography", Proc. SPIE 1573, Commercial Applications of Precision Manufacturing at the Sub-Micron Level, (1 April 1992); doi: 10.1117/12.57764; https://doi.org/10.1117/12.57764
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