1 April 1992 Surface characterisation via optical diffraction
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Abstract
Through the consideration of a surface as a reflective phase grating, this paper establishes the various relationships between the statistical parameters of the surface topography and the far- field diffraction pattern. These relationships have been incorporated into Talyfine, a new measuring instrument designed primarily for the measurement of flats and cylinders. The performance of this instrument is compared against established stylus-based surface texture measuring instruments, Talystep and Form Talysurf.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Daniel I. Mansfield, "Surface characterisation via optical diffraction", Proc. SPIE 1573, Commercial Applications of Precision Manufacturing at the Sub-Micron Level, (1 April 1992); doi: 10.1117/12.57758; https://doi.org/10.1117/12.57758
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