1 April 1992 Surface characterisation via optical diffraction
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Abstract
Through the consideration of a surface as a reflective phase grating, this paper establishes the various relationships between the statistical parameters of the surface topography and the far- field diffraction pattern. These relationships have been incorporated into Talyfine, a new measuring instrument designed primarily for the measurement of flats and cylinders. The performance of this instrument is compared against established stylus-based surface texture measuring instruments, Talystep and Form Talysurf.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Daniel I. Mansfield, Daniel I. Mansfield, } "Surface characterisation via optical diffraction", Proc. SPIE 1573, Commercial Applications of Precision Manufacturing at the Sub-Micron Level, (1 April 1992); doi: 10.1117/12.57758; https://doi.org/10.1117/12.57758
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