Grazing angle microscopy: a new technique for surface analysis

John A. Reffner; William T. Wihlborg; M. C. Sweeney

doi:10.1117/12.56325

1 March 1992 Grazing angle microscopy: a new technique for surface analysis

John A. Reffner, William T. Wihlborg, M. C. Sweeney

Proceedings Volume 1575, 8th Intl Conf on Fourier Transform Spectroscopy; (1992) https://doi.org/10.1117/12.56325
Event: Eighth International Conference on Fourier Transform Spectroscopy, 1991, Lubeck-Travemunde, Germany

Abstract

Grazing angle spectroscopy (GAS) has been extended to microscopic sampling areas by a special objective lens and an FT-IR research microscope. While the advantages of grazing incidence for the study of thin films on metals has been known and applied since the mid-1960s, GAS measurements have been limited to samples with large smooth flat surfaces. The grazing angle microscope objective reduces the scale of GAS samples from centimeters to micrometers. This reduction of the sampling area makes it possible to analyze samples with either small or irregular surfaces. In this work, specific examples are presented to illustrate that micro-GAS can yield useful data from samples too small or too irregularly shaped for conventional GAS. Specific examples of micro-GAS analyses are a lubricant film on a ball bearing, a surface film on an LDEF test panel, a boric acid solid lubricant on steel, and a polycarbonate-aluminum bonding surface.

Citation Download Citation

John A. Reffner, William T. Wihlborg, and M. C. Sweeney "Grazing angle microscopy: a new technique for surface analysis", Proc. SPIE 1575, 8th Intl Conf on Fourier Transform Spectroscopy, (1 March 1992); https://doi.org/10.1117/12.56325

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