Oxygen precipitate mapping in silicon using micro-FTIR spectroscopy

Adele Sassella; Alessandro Borghesi

doi:10.1117/12.56472

1 March 1992 Oxygen precipitate mapping in silicon using micro-FTIR spectroscopy

Adele Sassella, Alessandro Borghesi

Proceedings Volume 1575, 8th Intl Conf on Fourier Transform Spectroscopy; (1992) https://doi.org/10.1117/12.56472
Event: Eighth International Conference on Fourier Transform Spectroscopy, 1991, Lubeck-Travemunde, Germany

Abstract

We present a new high spatial resolution Fourier transform infrared technique which can detect low concentrations of SiO2 particles embedded in a silicon matrix. We use 30 micrometers diameter spots and scan the samples to obtain an optical response map of such precipitates.

Citation Download Citation

Adele Sassella and Alessandro Borghesi "Oxygen precipitate mapping in silicon using micro-FTIR spectroscopy", Proc. SPIE 1575, 8th Intl Conf on Fourier Transform Spectroscopy, (1 March 1992); https://doi.org/10.1117/12.56472

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