1 March 1992 Seeing more, looking at less: applications of IR microscopy
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Proceedings Volume 1575, 8th Intl Conf on Fourier Transform Spectroscopy; (1992) https://doi.org/10.1117/12.56457
Event: Eighth International Conference on Fourier Transform Spectroscopy, 1991, Lubeck-Travemunde, Germany
Abstract
Applications of IR microscopy in solid state physics are shown, namely, the investigations of layer thickness variations in semiconductor systems and of the scattering characteristics of small particles, both making use of the ability to take spectra from small sample spots.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Peter Grosse, Lukas Kuepper, Wolfgang Theiss, "Seeing more, looking at less: applications of IR microscopy", Proc. SPIE 1575, 8th Intl Conf on Fourier Transform Spectroscopy, (1 March 1992); doi: 10.1117/12.56457; https://doi.org/10.1117/12.56457
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