1 October 1991 A sensitive HTSC thin film bolometer with ultra-wide wavelength response
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Proceedings Volume 1576, 16th International Conference on Infrared and Millimeter Waves; 15761C (1991) https://doi.org/10.1117/12.2297761
Event: 16th International Conference on Infrared and Millimeter Waves, 1991, Lausanne, Switzerland
Abstract
We have fabricated HTSC bolometers with a responsivity that is essentially wavelength independent in the range from λ ∼ 0.6 μm to 450 μm. They consist of a thin film of YBaCuO on a SrTiO3 substrate and were patterned by photolithography in the form of a micro-bridge (20 x 20 μm2). A maximum responsivity of S = 0.1 V/W and an NEP = 2.10-7 W/√Hz have been obtained when the element was operated near the transition temperature of 90°K. The frequency response varies like S ≈ 1/√f which indicates a strong thermal coupling of the micro-bolometer to the substrate. Higher responsivities (S ≈ 800 V/W and an NEP of 2.10-11 W/√HZ) have been obtained using a second type of detector element in the form of a meander covering an area of 1 mm2. For these elements a frequency response S ≈ 1/f and a cut-off frequency of 0.1Hz have been found.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
B. Dwir, B. Dwir, } "A sensitive HTSC thin film bolometer with ultra-wide wavelength response", Proc. SPIE 1576, 16th International Conference on Infrared and Millimeter Waves, 15761C (1 October 1991); doi: 10.1117/12.2297761; https://doi.org/10.1117/12.2297761
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