Paper
1 October 1991 Millimeter wave GaAs Schottky barrier photodiodes
K. Y. Hur
Author Affiliations +
Proceedings Volume 1576, 16th International Conference on Infrared and Millimeter Waves; 15762W (1991) https://doi.org/10.1117/12.2297817
Event: 16th International Conference on Infrared and Millimeter Waves, 1991, Lausanne, Switzerland
Abstract
This paper reports on the design, fabrication, and testing of a series of GaAs Schottky barrier photodiodes with extrapolated RC time constants in excess of 100 GHz.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
K. Y. Hur "Millimeter wave GaAs Schottky barrier photodiodes", Proc. SPIE 1576, 16th International Conference on Infrared and Millimeter Waves, 15762W (1 October 1991); https://doi.org/10.1117/12.2297817
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KEYWORDS
Photodiodes

Gallium arsenide

Extremely high frequency

Waveguides

Anisotropic etching

Capacitance

Etching

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