1 December 1991 Fabrication of large multimode glass waveguides by dry silver ion exchange in vacuum
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Proceedings Volume 1583, Integrated Optical Circuits; (1991); doi: 10.1117/12.50874
Event: OE Fiber, 1991, Boston, MA, United States
Abstract
A dry silver ion exchange process is described, in which silver evaporation and ion exchange are performed successively in a vacuum chamber. This makes possible the reproducible fabrication of large, nearly step index multimode waveguides. Asymmetric power dividers have been fabricated with the process.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Simo K. T. Tammela, Harri Pohjonen, Seppo Honkanen, Ari Tervonen, "Fabrication of large multimode glass waveguides by dry silver ion exchange in vacuum", Proc. SPIE 1583, Integrated Optical Circuits, (1 December 1991); doi: 10.1117/12.50874; https://doi.org/10.1117/12.50874
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KEYWORDS
Waveguides

Silver

Glasses

Ion exchange

Ions

Photomasks

Photonic integrated circuits

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