Laser-induced etched grating on InP for integrated optical circuit elements

Haim Grebel; P. Pien

doi:10.1117/12.50910

1 December 1991 Laser-induced etched grating on InP for integrated optical circuit elements

Haim Grebel, P. Pien

Proceedings Volume 1583, Integrated Optical Circuits; (1991) https://doi.org/10.1117/12.50910
Event: OE Fiber, 1991, Boston, MA, United States

Abstract

Based on a non-linear coupling between the etchant species and the photo-induced carriers during photo-electrochemical etching of semiconductor surfaces, we propose that the reaction residue, the oxide layer, regulates the reaction.

Citation Download Citation

Haim Grebel and P. Pien "Laser-induced etched grating on InP for integrated optical circuit elements", Proc. SPIE 1583, Integrated Optical Circuits, (1 December 1991); https://doi.org/10.1117/12.50910

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