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1 March 1992 Totally integrated optical measuring sensors
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Abstract
Various schemes are proposed for realizing compact, truly integrated optical sensors based on a single technology or at least a sequence of compatible processes for their fabrication. These totally integrated sensor modules not only eliminate the need for external components and their respective alignment, but also achieve reduced size and weight, improved stability, mass- production potential, and the possibility of single chip multi-element sensor arrays. Furthermore, they lend themselves to being incorporated into sensor networks.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rino E. Kunz "Totally integrated optical measuring sensors", Proc. SPIE 1587, Chemical, Biochemical, and Environmental Fiber Sensors III, (1 March 1992); https://doi.org/10.1117/12.56538
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