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27 October 1978 Ion Polishing As A Surface Preparation For Dielectric Coating Of Diamond-Turned Optics
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Abstract
A technique to improve the adherence of multilayer dielectric coatings to diamond-turned copper mirror surfaces was developed. The method employs carefully controlled ion polishing, vacuum annealing, and "in situ" coating of the mirror substrates. It was found that ion polishing the substrates, with as little as 100 A removed, prior to coating improved the film adhesion significantly. All of the samples prepared in this manner passed all of the standard MIL SPEC mechanical tests while control samples produced by conventional methods failed the tests. Additional coating evaluation such as reflectivity and laser damage threshold measurements at 10.6 pm, Auger analysis for contaminants in the films and at interfaces, SEM characterization, and x-ray energy dispersive analysis are also discussed.
© (1978) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
R. A. Hoffman, w. J. Lange, J. G. Gowan, and C. J. Miglionico "Ion Polishing As A Surface Preparation For Dielectric Coating Of Diamond-Turned Optics", Proc. SPIE 0159, Precision Machining of Optics, (27 October 1978); https://doi.org/10.1117/12.956837
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