1 January 1992 High-resolution surface plasmon measurements: a sensitive probe for thickness and structural information of ultrathin films
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Proceedings Volume 1594, Process Module Metrology, Control and Clustering; (1992); doi: 10.1117/12.56648
Event: Microelectronic Processing Integration, 1991, San Jose, CA, United States
Abstract
We describe the use of optically excited surface plasmons to measure the thickness of ultrathin films deposited on gold and silver surfaces with submonolayer resolution. Additional structural information on the film is obtained by looking at the scattering of the surface plasmons. Applications of this method to physisorbed and quench-condensed molecular hydrogen films and to spreading of liquids are presented.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Uwe Albrecht, H. Dilger, P. Evers, Paul Leiderer, "High-resolution surface plasmon measurements: a sensitive probe for thickness and structural information of ultrathin films", Proc. SPIE 1594, Process Module Metrology, Control and Clustering, (1 January 1992); doi: 10.1117/12.56648; https://doi.org/10.1117/12.56648
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KEYWORDS
Surface plasmons

Hydrogen

Gold

Process control

Dielectrics

Prisms

Silver

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