Ultra Large Scale Integrated (ULSI) device requirements constantly challenge the technological frontiers of equipment capabilities. In order to have high uptime it is now required for machines to contain a certain level of intelligence. By utilizing on-board diagnostics, the equipment is able to inform operators of the change in the status of the equipment before a hard failure occurs. This is particularly important in high volume manufacturing where it is not acceptable to incur hard failures which can cause production losses. Drytek has developed software which incorporates in situ diagnostics and monitoring in order to meet the needs of today's leading edge IC manufacturers. These products allow for user definable parameters to be monitored in real-time, both on the tool and through a SECS I and II protocol port for host computer communications. This paper describes Drytek's approach to onboard diagnostics and process monitoring and presents the benefits and uses of such on-board capabilities.