Raman microprobe scattering is shown to be a useful non-invasive real-time probe during thin film processing. Applications during laser-assisted processing that are relevant to microelectronics are emphasized.
Irving P. Herman,
"Raman scattering as an in-situ optical diagnostic", Proc. SPIE 1594, Process Module Metrology, Control and Clustering, (1 January 1992); doi: 10.1117/12.56643; https://doi.org/10.1117/12.56643