1 January 1992 Raman scattering as an in-situ optical diagnostic
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Proceedings Volume 1594, Process Module Metrology, Control and Clustering; (1992); doi: 10.1117/12.56643
Event: Microelectronic Processing Integration, 1991, San Jose, CA, United States
Abstract
Raman microprobe scattering is shown to be a useful non-invasive real-time probe during thin film processing. Applications during laser-assisted processing that are relevant to microelectronics are emphasized.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Irving P. Herman, "Raman scattering as an in-situ optical diagnostic", Proc. SPIE 1594, Process Module Metrology, Control and Clustering, (1 January 1992); doi: 10.1117/12.56643; https://doi.org/10.1117/12.56643
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KEYWORDS
Raman spectroscopy

Raman scattering

Silicon

Phonons

Laser scattering

Semiconductor lasers

Crystals

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