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Influence of pyrometer signal absorption due to process gas on temperature control in rapid thermal processing
Applications of surface charge analyzer for use in process control and in-line characterization of reoxidized nitrided oxide (ONO) films
Epitaxial growth and processing of Si1-xGex/Si for heterojunction bipolar transistors using rapid thermal techniques
Optical properties of Si1-xGex quantum wells and superlattices grown by rapid thermal chemical vapor deposition
Damage and RTA kinetics in Ar+ and Si+ ion-implanted CZ silicon characterized by thermal wave modulated optical reflectance
Development and characterization of an ultrathin rapid thermal silicon nitride for IC sensor applications