Applications of surface charge analyzer for use in process control and in-line characterization of reoxidized nitrided oxide (ONO) films

James S. Cable; Chandra Kantamneni; Izak Bencuya

doi:10.1117/12.56664

1 February 1992 Applications of surface charge analyzer for use in process control and in-line characterization of reoxidized nitrided oxide (ONO) films

James S. Cable, Chandra Kantamneni, Izak Bencuya

Author Affiliations +

Proceedings Volume 1595, Rapid Thermal and Integrated Processing; (1992) https://doi.org/10.1117/12.56664
Event: Microelectronic Processing Integration, 1991, San Jose, CA, United States

Abstract

We report in this work the application of the Surface Charge Analysis (SCA) technique for in-line process control and characterization of re-oxidized nitrided oxide (ONO) films processed by RiP. Film samples with a wide variety of processing conditions have been fabricated and characterized using the SCA technique. Following SCA characterization, electrodes were formed on the samples followed by detailed CV measurements. Finally, correlations between SCA and CV determined parameters were established. Since the SCA is an optical technique which is non-invasive and requires no electrode processing, and some degree of correlation was found between the two techniques, this suggests that the SCA warrants further investigation as a technique for in-line process control and characterization for RTP grown ONO films.

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James S. Cable, Chandra Kantamneni, and Izak Bencuya "Applications of surface charge analyzer for use in process control and in-line characterization of reoxidized nitrided oxide (ONO) films", Proc. SPIE 1595, Rapid Thermal and Integrated Processing, (1 February 1992); https://doi.org/10.1117/12.56664

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