Material influence on cutting and drilling of metals using copper vapor lasers

Roland Kupfer; Hans W. Bergmann; Marion Lingenauer

doi:10.1117/12.51025

1 December 1991 Material influence on cutting and drilling of metals using copper vapor lasers

Roland Kupfer, Hans W. Bergmann, Marion Lingenauer

Proceedings Volume 1598, Lasers in Microelectronic Manufacturing; (1991) https://doi.org/10.1117/12.51025
Event: Microelectronic Processing Integration, 1991, San Jose, CA, United States

Abstract

Up to now, copper vapor lasers (CVLs) have been mainly applied in the field of nuclear fuel enrichment, as illumination sources, in short time photography and in medical applications. Due to their interesting characteristics (short pulse duration, high repetition rate) these lasers might also become useful in the field of materials processing. In this paper recent investigations on the drilling behavior of different metals with a CVL are reported. Fine drilled holes in thin metal sheets with minimized heat affected zones could be obtained. Microscopical investigations were used to characterize the influence of different substrates and processing conditions.

Citation Download Citation

Roland Kupfer, Hans W. Bergmann, and Marion Lingenauer "Material influence on cutting and drilling of metals using copper vapor lasers", Proc. SPIE 1598, Lasers in Microelectronic Manufacturing, (1 December 1991); https://doi.org/10.1117/12.51025

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available